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SPIE Proceedings [SPIE Advanced Lithography - San Jose, CA (Sunday 25 February 2007)] Advances in Resist Materials and Processing Technology XXIV - Evaluation of the 3D compositional heterogeneity effect on line-edge-roughness
Kang, Shuhui, Lin, Qinghuang, Wu, Wen-Li, Prabhu, Vivek M., Vogt, Bryan D., Lin, Eric K., Turnquest, KarenVolume:
6519
Year:
2007
Language:
english
DOI:
10.1117/12.712682
File:
PDF, 293 KB
english, 2007