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SPIE Proceedings [SPIE MOEMS-MEMS 2007 Micro and Nanofabrication - San Jose, California, United States (Saturday 20 January 2007)] Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS VI - Critical comparison of metrology techniques for MEMS
da Silva, Mark G., Hartzell, Allyson L., Ramesham, Rajeshuni, Bouwstra, SiebeVolume:
6463
Year:
2007
Language:
english
DOI:
10.1117/12.714852
File:
PDF, 259 KB
english, 2007