SPIE Proceedings [SPIE Optical Metrology - Munich, Germany (Monday 18 June 2007)] Optical Measurement Systems for Industrial Inspection V - Characterization and compensation of decorrelations in interferometric set-ups using active optics
Hällstig, Emil, Svanbro, Angelica, Osten, Wolfgang, Gorecki, Christophe, Novak, Erik L.Volume:
6616
Year:
2007
Language:
english
DOI:
10.1117/12.726054
File:
PDF, 1003 KB
english, 2007