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SPIE Proceedings [SPIE Sixth International Conference on Thin Film Physics and Applications - Shanghai, China (Tuesday 25 September 2007)] Sixth International Conference on Thin Film Physics and Applications - Investigation of nanostructure on silicon by electrochemical etching
Xu, Liang, You, Jinchuan, Wang, LianweiVolume:
6984
Year:
2007
Language:
english
DOI:
10.1117/12.792382
File:
PDF, 2.65 MB
english, 2007