SPIE Proceedings [SPIE SPIE MOEMS-MEMS - San Francisco, California (Saturday 22 January 2011)] Micromachining and Microfabrication Process Technology XVI - Development of a novel thermal switch through CMOS MEMS fabrication process
Lai, You-Liang, Maher, Mary Ann, Chiao, Jung-Chih, Chou, Lei-Chun, Juang, Ying-Zong, Resnick, Paul J., Tsai, Hann-Huei, Huang, Sheng-Chieh, Chiou, Jin-ChernVolume:
7926
Year:
2011
Language:
english
DOI:
10.1117/12.874420
File:
PDF, 1.33 MB
english, 2011