SPIE Proceedings [SPIE SPIE Microtechnologies - Prague,...

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SPIE Proceedings [SPIE SPIE Microtechnologies - Prague, Czech Republic (Monday 18 April 2011)] Smart Sensors, Actuators, and MEMS V - Development of capacitive RF MEMS switches with TaN and Ta 2 O 5 thin films

Persano, Anna, Schmid, Ulrich, Sánchez-Rojas, José Luis, Quaranta, Fabio, Cola, Adriano, Leester-Schaedel, Monika, De Angelis, Giorgio, Marcelli, Romolo, Siciliano, Pietro
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Volume:
8066
Year:
2011
Language:
english
DOI:
10.1117/12.886715
File:
PDF, 633 KB
english, 2011
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