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SPIE Proceedings [SPIE Seventh International Conference on Thin Film Physics and Applications - Shanghai, China (Friday 24 September 2010)] Seventh International Conference on Thin Film Physics and Applications - Effect of deposition rate on the DUV/VUV reflectance of MgF 2 protected aluminum mirrors with e-beam evaporation
Wang, Tong-tong, Chu, Junhao, Wang, Zhanshan, Gao, Jin-songVolume:
7995
Year:
2010
Language:
english
DOI:
10.1117/12.888553
File:
PDF, 527 KB
english, 2010