SPIE Proceedings [SPIE SPIE NanoScience + Engineering - San...

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SPIE Proceedings [SPIE SPIE NanoScience + Engineering - San Diego, California, USA (Sunday 21 August 2011)] Nano-Opto-Mechanical Systems (NOMS) - Opto-thermal actuation in double layer polymer microcantilevers

Martin-Olmos, C., Esteve, Jaume, Terentjev, Eugene M., Villanueva, L. G., Llobera, A., Campo, Eva M., Voigt, A., Gruetzner, G., Abadal, G., Perez-Murano, F.
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Volume:
8107
Year:
2011
Language:
english
DOI:
10.1117/12.897353
File:
PDF, 1.29 MB
english, 2011
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