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SPIE Proceedings [SPIE 28th European Mask and Lithography Conference (EMLC 2012) - Dresden, Germany (Tuesday 17 January 2012)] 28th European Mask and Lithography Conference - Cleaning aspects of material choice for high end mask manufacturing
Nesladek, Pavel, Osborne, Steve, Rümmelin, Stefan, Behringer, Uwe F.W., Maurer, WilhelmVolume:
8352
Year:
2012
Language:
english
DOI:
10.1117/12.920564
File:
PDF, 713 KB
english, 2012