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SPIE Proceedings [SPIE 20th Annual Technical Symposium - San Diego (Monday 23 August 1976)] Polarized Light: Instruments, Devices, Applications - Ellipsometric Measurements Of Thin Residual Films On Thermally Oxidized Silicon
So, Samuel S., Zimmerman, S. M., Azzam, Rasheed M. A., Hyde, W. LewisVolume:
88
Year:
1976
Language:
english
DOI:
10.1117/12.955023
File:
PDF, 313 KB
english, 1976