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SPIE Proceedings [SPIE 1989 Microelectronic Intergrated Processing Conferences - Santa Clara (Tuesday 10 October 1989)] Rapid Isothermal Processing - Rapid Thermal Multiprocessing For Micro Factories
Saraswat, Krishna C., Booth, Len, Grossman, David D., Khuri-Yakub, B. T., Lee, Yong Jin, Moslehi, Mehrdad M., Wood, Samuel, Singh, RajendraVolume:
1189
Year:
1990
Language:
english
DOI:
10.1117/12.963953
File:
PDF, 683 KB
english, 1990