SPIE Proceedings [SPIE SPIE Laser Damage - Boulder, Colorado, USA (Sunday 23 September 2012)] Laser-Induced Damage in Optical Materials: 2012 - Laser removal of positive-tone diazonaphthoquinone / novolak resist without occurring laser-induced damage to the silicon wafer
Muraoka, Hiroki, Kamimura, Tomosumi, Yamana, Yuki, Matsura, Yoshiaki, Horibe, Hideo, Exarhos, Gregory J., Gruzdev, Vitaly E., Menapace, Joseph A., Ristau, Detlev, Soileau, M JVolume:
8530
Year:
2012
Language:
english
DOI:
10.1117/12.977338
File:
PDF, 332 KB
english, 2012