Vertical Slit FET at 7-nm Node and Beyond

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IEEE Transactions on Electron Devices 2016

Vertical Slit FET at 7-nm Node and Beyond

Yang, Ping-Lin, Hook, Terence B., Oldiges, Philip J., Doris, Bruce B.
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Year:
2016
Language:
english
Journal:
IEEE Transactions on Electron Devices
DOI:
10.1109/TED.2016.2577629
File:
PDF, 3.69 MB
english, 2016
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