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SPIE Proceedings [SPIE OE/LASE'93: Optics, Electro-Optics, & Laser Applications in Science& Engineering - Los Angeles, CA (Sunday 17 January 1993)] Laser Radiation Photophysics - Formation of microrelief on silicon surface under action of radiation pulses with different polarization
Makin, Vladimir S., Gashkov, Oleg P., Libenson, Mikhail N., Trubaev, Vladimir V., Braren, Bodil, Libenson, Mikhail N.Volume:
1856
Year:
1993
Language:
english
DOI:
10.1117/12.147625
File:
PDF, 1.28 MB
english, 1993