![](/img/cover-not-exists.png)
SPIE Proceedings [SPIE Photomask and NGL Mask Technology XX - Yokohama, Japan (Tuesday 16 April 2013)] Photomask and Next-Generation Lithography Mask Technology XX - Mask degradation monitoring with aerial mask inspector
Tseng, Wen-Jui, Fu, Yung-Ying, Lu, Shih-Ping, Jiang, Ming-Sian, Lin, Jeffrey, Wu, Clare, Lifschitz, Sivan, Tam, Aviram, Kato, KokoroVolume:
8701
Year:
2013
Language:
english
DOI:
10.1117/12.2028101
File:
PDF, 1.18 MB
english, 2013