SPIE Proceedings [SPIE Micromachining and Microfabrication - Austin, TX (Monday 23 October 1995)] Micromachining and Microfabrication Process Technology - Deep x-ray lithography for micromechanics
Christenson, Todd R., Guckel, Henry, Markus, Karen W.Volume:
2639
Year:
1995
Language:
english
DOI:
10.1117/12.221271
File:
PDF, 775 KB
english, 1995