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SPIE Proceedings [SPIE SPIE's 1996 International Symposium on Microlithography - Santa Clara, CA (Sunday 10 March 1996)] Metrology, Inspection, and Process Control for Microlithography X - Electrical test structures replicated in silicon-on-insulator material
Cresswell, Michael W., Sniegowski, Jeffry J., Ghoshtagore, Rathindra N., Allen, Richard A., Linholm, Loren W., Villarrubia, John S., Jones, Susan K.Volume:
2725
Year:
1996
Language:
english
DOI:
10.1117/12.240117
File:
PDF, 1.25 MB
english, 1996