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SPIE Proceedings [SPIE Micromachining and Microfabrication '96 - Austin, TX (Monday 14 October 1996)] Micromachined Devices and Components II - Silicon integrated microsensor incorporating a metal-doped phthalocyanine organic semiconductor used to selectively detect nitrogen dioxide and an organophosphorus compound
Kolesar, Jr., Edward S., Wiseman, John M., Chau, Kevin H., Roop, Ray M.Volume:
2882
Year:
1996
Language:
english
DOI:
10.1117/12.250724
File:
PDF, 5.02 MB
english, 1996