SPIE Proceedings [SPIE SPIE Proceedings - (Sunday 12 February 2012)] - 2.5 kHz high-repetition-rate XeCl excimer laser
Ishikawa, Ken, Takagi, S., Okamoto, Naomichi, Kakizaki, K., Satoh, Saburoh, Goto, Tatsumi, Spigulis, Janis, Domingo, Concepcion M., Yoon, Soon Fatt, Doherty, Victor J., Kuok, M. H., Orza, Jose M., KruYear:
2012
Language:
english
DOI:
10.1117/12.25986
File:
PDF, 169 KB
english, 2012