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SPIE Proceedings [SPIE Photonics West '97 - San Jose, CA (Saturday 8 February 1997)] Miniaturized Systems with Micro-Optics and Micromechanics II - Designs to improve polysilicon micromirror surface topology
Burns, David M., Bright, Victor M., Motamedi, M. Edward, Hornbeck, Larry J., Pister, Kristofer S. J.Volume:
3008
Year:
1997
Language:
english
DOI:
10.1117/12.271405
File:
PDF, 1.02 MB
english, 1997