SPIE Proceedings [SPIE Micromachining and Microfabrication...

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SPIE Proceedings [SPIE Micromachining and Microfabrication - Austin, TX (Monday 29 September 1997)] Microlithography and Metrology in Micromachining III - Mechanical properties of microstructures: experiments and theory

Dual, Jurg, Mazza, Edoardo, Schiltges, Gilbert, Schlums, Dirk H., Friedrich, Craig R., Umeda, Akira
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Volume:
3225
Year:
1997
Language:
english
DOI:
10.1117/12.284550
File:
PDF, 1.43 MB
english, 1997
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