SPIE Proceedings [SPIE Micromachining and Microfabrication - Austin, TX (Monday 29 September 1997)] Microlithography and Metrology in Micromachining III - Mechanical properties of microstructures: experiments and theory
Dual, Jurg, Mazza, Edoardo, Schiltges, Gilbert, Schlums, Dirk H., Friedrich, Craig R., Umeda, AkiraVolume:
3225
Year:
1997
Language:
english
DOI:
10.1117/12.284550
File:
PDF, 1.43 MB
english, 1997