SPIE Proceedings [SPIE Microelectronic Manufacturing -...

  • Main
  • SPIE Proceedings [SPIE Microelectronic...

SPIE Proceedings [SPIE Microelectronic Manufacturing - Austin, TX (Wednesday 1 October 1997)] Microelectronic Device Technology - Scaling self-aligned contacts for 0.25-μm and below

Perera, Asanga H., Pfiester, Jim R., Lii, Tom, Feng, Chris, Bhat, Mousumi, Dao, Thuy, Molloy, John, Blackwell, Michael, Cecil, Joe, Rodder, Mark, Tsuchiya, Toshiaki, Burnett, David, Wristers, Dirk
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
3212
Year:
1997
Language:
english
DOI:
10.1117/12.284590
File:
PDF, 749 KB
english, 1997
Conversion to is in progress
Conversion to is failed