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SPIE Proceedings [SPIE Microelectronic Manufacturing - Austin, TX (Wednesday 1 October 1997)] In-Line Characterization Techniques for Performance and Yield Enhancement in Microelectronic Manufacturing - In-line testing of antenna-type test structures for separation of sources of process-induced damage
Brozek, Tomasz, Roberts, Douglas, Dao, Thuy, DeBusk, Damon K., Ajuria, Sergio A.Volume:
3215
Year:
1997
Language:
english
DOI:
10.1117/12.284672
File:
PDF, 524 KB
english, 1997