SPIE Proceedings [SPIE Microelectronic Manufacturing - Austin, TX (Wednesday 1 October 1997)] In-Line Characterization Techniques for Performance and Yield Enhancement in Microelectronic Manufacturing - New aspects of optical scatterometry applied to microtechnology
Bischoff, Joerg, Hutschenreuther, Lutz, Truckenbrodt, Horst, DeBusk, Damon K., Ajuria, Sergio A.Volume:
3215
Year:
1997
Language:
english
DOI:
10.1117/12.284680
File:
PDF, 1.01 MB
english, 1997