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SPIE Proceedings [SPIE ALT '97 International Conference on Laser Surface Processing - Limoges, France (Monday 8 September 1997)] ALT'97 International Conference on Laser Surface Processing - Laser-stimulated modification of the structure of silicon layers produced with the LCVD method
Dar'yushkin, A. E., Korovin, S. B., Pustovoy, Vladimir I., Pustovoy, Vladimir I.Volume:
3404
Year:
1998
Language:
english
DOI:
10.1117/12.308624
File:
PDF, 169 KB
english, 1998