![](/img/cover-not-exists.png)
SPIE Proceedings [SPIE Microelectronic Manufacturing - Santa Clara, CA (Sunday 20 September 1998)] Multilevel Interconnect Technology II - Integration of hydrogen silsesquioxane into an advanced BiCMOS process
Olewine, Michael, Wall, Ralph N., Colovos, Gus J., Graef, Mart, Patel, Divyesh N.Volume:
3508
Year:
1998
Language:
english
DOI:
10.1117/12.324032
File:
PDF, 1.38 MB
english, 1998