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SPIE Proceedings [SPIE 18th Annual BACUS Symposium on Photomask Technology and Management - Redwood City, CA (Wednesday 16 September 1998)] 18th Annual BACUS Symposium on Photomask Technology and Management - Application of HT-PSM to 180-nm logic devices
Kikuchi, Yasutaka, Seno, Takashi, Kawanabe, Kensuke, Bunki, Eiji, Otsuka, Yuki, Yamada, Yoshiro, Grenon, Brian J., Abboud, Frank E.Volume:
3546
Year:
1998
Language:
english
DOI:
10.1117/12.332876
File:
PDF, 1.01 MB
english, 1998