SPIE Proceedings [SPIE Optoelectronics '99 - Integrated Optoelectronic Devices - San Jose, CA (Saturday 23 January 1999)] Diffractive and Holographic Technologies, Systems, and Spatial Light Modulators VI - MEMS microshutter SLM for intensity modulation
Karpinsky, John R., Clark, Rodney L., Hammer, Jay A., Brown, Daniel M., Cindrich, Ivan, Lee, Sing H., Sutherland, Richard L.Volume:
3633
Year:
1999
Language:
english
DOI:
10.1117/12.349335
File:
PDF, 3.82 MB
english, 1999