![](/img/cover-not-exists.png)
SPIE Proceedings [SPIE Microlithography '99 - Santa Clara, CA (Sunday 14 March 1999)] Metrology, Inspection, and Process Control for Microlithography XIII - Application of resolution enhancement techniques in thin film head processing
Tong, Lijun, Hsiang, Joyce, Gossett, Johnny, Newman, Gary, Abreau, Kelly J., Chuang, Tzu-chin, Singh, BhanwarVolume:
3677
Year:
1999
Language:
english
DOI:
10.1117/12.350869
File:
PDF, 2.23 MB
english, 1999