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SPIE Proceedings [SPIE 1999 Symposium on Smart Structures and Materials - Newport Beach, CA (Monday 1 March 1999)] Smart Structures and Materials 1999: Smart Electronics and MEMS - Two-input axis angular rate sensor
An, Seungdo, Park, K.Y., Oh, Yong-Soo, Song, Ci M., Varadan, Vijay K.Volume:
3673
Year:
1999
Language:
english
DOI:
10.1117/12.354272
File:
PDF, 1.31 MB
english, 1999