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SPIE Proceedings [SPIE Micromachining and Microfabrication - Santa Clara, CA (Monday 18 September 2000)] Micromachined Devices and Components VI - Planar latch-up microactuator driven by thermoelastic force
Lee, Jong-Hyun, Lee, Myung-Lae, Jang, Won-Ick, Choi, Chang-Auck, Kim, Youn Tae, Peeters, Eric, Paul, OliverVolume:
4176
Year:
2000
Language:
english
DOI:
10.1117/12.395638
File:
PDF, 2.04 MB
english, 2000