SPIE Proceedings [SPIE Micromachining and Microfabrication - Santa Clara, CA (Monday 18 September 2000)] Micromachining and Microfabrication Process Technology VI - Development of polysilicon films for MEMS integration with submicrometer CMOS process
McCarson, Brian L., Yip, Benjamin, Reno, Chris, Gorrell, Jonathan, Gogoi, Bishnu P., Karam, Jean Michel, Yasaitis, John A.Volume:
4174
Year:
2000
Language:
english
DOI:
10.1117/12.396463
File:
PDF, 1.20 MB
english, 2000