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SPIE Proceedings [SPIE Optics and Optoelectronic Inspection and Control: Techniques, Applications, and Instruments - Beijing, China (Wednesday 8 November 2000)] Process Control and Inspection for Industry - Development of research on super-precision measurement techniques for circle and cylindrical contour
Tan, Jiubin, Zhao, Weiqian, Yang, Wenguo, Zhang, Shulian, Gao, WeiVolume:
4222
Year:
2000
Language:
english
DOI:
10.1117/12.403871
File:
PDF, 159 KB
english, 2000