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SPIE Proceedings [SPIE Design, Test, Integration, and Packaging of MEMS/MOEMS 2001 - Cannes-Mandelieu, France (Wednesday 25 April 2001)] Design, Test, Integration, and Packaging of MEMS/MOEMS 2001 - Dynamic simulation of optical MEM switches
Kurzweg, Timothy P., Martinez, Jose A., Levitan, Steven P., Marchand, Philippe J., Chiarulli, Donald M., Courtois, Bernard, Karam, Jean Michel, Levitan, Steven P., Markus, Karen W., Tay, Andrew A. O.,Volume:
4408
Year:
2001
Language:
english
DOI:
10.1117/12.425349
File:
PDF, 1.01 MB
english, 2001