SPIE Proceedings [SPIE International Symposium on Optical Science and Technology - San Diego, CA (Sunday 29 July 2001)] Engineering Thin Films with Ion Beams, Nanoscale Diagnostics, and Molecular Manufacturing - Low-energy ion implantation-induced control of InP-based heterostructure properties
Aimez, Vincent, Beauvais, Jacques, Drouin, Dominique, Beerens, Jean, Morris, Denis, Jandl, Serge, Knystautas, Emile J., Kirk, Wiley P., Browning, ValerieVolume:
4468
Year:
2001
Language:
english
DOI:
10.1117/12.452544
File:
PDF, 401 KB
english, 2001