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SPIE Proceedings [SPIE Micromachining and Microfabrication - San Jose, CA (Saturday 25 January 2003)] Micromachining and Microfabrication Process Technology VIII - Microfabrication services at INO
Alain, Christine, Jerominek, Hubert, Topart, Patrice A., Pope, Timothy D., Picard, Francis, Cayer, Felix, Larouche, Carl, Leclair, Sebastien, Tremblay, Bruno, Yasaitis, John A., Perez-Maher, Mary Ann,Volume:
4979
Year:
2003
Language:
english
DOI:
10.1117/12.472738
File:
PDF, 867 KB
english, 2003