![](/img/cover-not-exists.png)
SPIE Proceedings [SPIE Microlithography 2003 - Santa Clara, CA (Sunday 23 February 2003)] Emerging Lithographic Technologies VII - Fabrication of Step and Flash imprint lithography templates using commercial mask processes
Thompson, Ecron, Rhyins, Peter D., Voisin, Ronald D., Sreenivasan, S. V., Martin, Patrick M., Engelstad, Roxann L.Volume:
5037
Year:
2003
Language:
english
DOI:
10.1117/12.490141
File:
PDF, 393 KB
english, 2003