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SPIE Proceedings [SPIE Microtechnologies for the New Millennium 2003 - Maspalomas, Gran Canaria, Canary Islands, Spain (Monday 19 May 2003)] Smart Sensors, Actuators, and MEMS - Systematic design methodology of bistable compliant micro-mechanisms
Tsay, Jinni, Sung, Cheng-Kuo, Su, Liang-Qing, Chiao, Jung-Chih, Varadan, Vijay K., Can, CarlesVolume:
5116
Year:
2003
DOI:
10.1117/12.498874
File:
PDF, 581 KB
2003