SPIE Proceedings [SPIE Optical Science and Technology, SPIE's 48th Annual Meeting - San Diego, CA (Sunday 3 August 2003)] Recent Developments in Traceable Dimensional Measurements II - Next-generation Kosters interferometer
Decker, Jennifer E., Schodel, Rene, Bonsch, Gerhard, Decker, Jennifer E., Brown, NicholasVolume:
5190
Year:
2003
Language:
english
DOI:
10.1117/12.503565
File:
PDF, 216 KB
english, 2003