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SPIE Proceedings [SPIE Optical Science and Technology, SPIE's 48th Annual Meeting - San Diego, CA (Sunday 3 August 2003)] Advanced Characterization Techniques for Optics, Semiconductors, and Nanotechnologies - Comparative linewidth measurements on chrome and MoSi structures using newly developed microscopy methods
Bodermann, Bernd, Mirande, Werner, Kerwien, Norbert, Tavrov, Alexander, Totzeck, Michael, Tiziani, Hans, Duparre, Angela, Singh, BhanwarVolume:
5188
Year:
2003
Language:
english
DOI:
10.1117/12.509713
File:
PDF, 1.11 MB
english, 2003