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SPIE Proceedings [SPIE Smart Materials, Nano-, and Micro-Smart Systems - Sydney, Australia (Sunday 12 December 2004)] Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems II - Nanofabrication of charge-based Si:P quantum computer devices using single-ion implantation
Mitic, Mladen, Chiao, Jung-Chih, Jamieson, David N., Andresen, Soren E., Chan, Victor C., Faraone, Lorenzo, Dzurak, Andrew S., Buehler, Tilo M., Ferguson, Andrew J., Gauja, Eric, Hudson, Fay E., ReillVolume:
5650
Year:
2004
Language:
english
DOI:
10.1117/12.583284
File:
PDF, 232 KB
english, 2004