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SPIE Proceedings [SPIE MOEMS-MEMS 2006 Micro and Nanofabrication - San Jose, CA (Saturday 21 January 2006)] MEMS/MOEMS Components and Their Applications III - Silicon on insulator inertial MEMS device processing
Sawyer, William D., Prince, Mert S., Olivier, Scot S., Tadigadapa, Srinivas A., Henning, Albert K.Volume:
6113
Year:
2006
Language:
english
DOI:
10.1117/12.657138
File:
PDF, 298 KB
english, 2006