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SPIE Proceedings [SPIE SPIE Optics + Photonics - San Diego, California, USA (Sunday 13 August 2006)] Advances in X-Ray/EUV Optics, Components, and Applications - Understanding DC-bias sputtered thorium oxide thin films useful in EUV optics
Evans, William R., Khounsary, Ali M., Morawe, Christian, Barton, Sarah C., Clemens, Michael, Allred, David D.Volume:
6317
Year:
2006
Language:
english
DOI:
10.1117/12.687499
File:
PDF, 543 KB
english, 2006