SPIE Proceedings [SPIE 27th Annual BACUS Symposium on Photomask Technology - Monterey, CA (Monday 17 September 2007)] Photomask Technology 2007 - Improving the CD linearity and proximity performance of photomasks written on the Sigma7500-II DUV laser writer through embedded OPC
Österberg, Anders, Naber, Robert J., Kawahira, Hiroichi, Ivansen, Lars, Beyerl, Angela, Newman, Tom, Bowhill, Amanda, Sahouria, Emile, Schulze, SteffenVolume:
6730
Year:
2007
Language:
english
DOI:
10.1117/12.747074
File:
PDF, 841 KB
english, 2007