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SPIE Proceedings [SPIE MOEMS-MEMS 2008 Micro and Nanofabrication - San Jose, CA (Saturday 19 January 2008)] Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS VII - Electrical measurement of undercut in surface micromachining
Bhat, Somashekara, Hartzell, Allyson L., Ramesham, Rajeshuni, Bhattacharya, EnakshiVolume:
6884
Year:
2008
Language:
english
DOI:
10.1117/12.764417
File:
PDF, 412 KB
english, 2008