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SPIE Proceedings [SPIE SPIE Proceedings - (Sunday 12 February 2012)] - Multilayer Zr/Si filters for EUV lithography and for radiation source metrology
Bibishkin, M. S., Chkhalo, N. I., Gusev, S. A., Kluenkov, E. B., Lopatin, A. Y., Luchin, V. I., Pestov, A. E., Salashchenko, N. N., Shmaenok, L. A., Tsybin, N. N., Zuev, S. Y., Valiev, Kamil A., OrlikYear:
2012
Language:
english
DOI:
10.1117/12.802347
File:
PDF, 1.04 MB
english, 2012