SPIE Proceedings [SPIE Ninth International Symposium on Laser Metrology - Unknown, Singapore (Monday 30 June 2008)] Ninth International Symposium on Laser Metrology - Structure measurement of phase grating on post-magnification digital micro-holography
Zhou, Wenjing, Quan, Chenggen, Asundi, Anand, Yu, Yingjie, Asundi, AnandVolume:
7155
Year:
2008
Language:
english
DOI:
10.1117/12.814508
File:
PDF, 509 KB
english, 2008