SPIE Proceedings [SPIE SPIE Optical Engineering + Applications - San Diego, CA (Sunday 2 August 2009)] Advances in X-Ray/EUV Optics and Components IV - 5000 groove/mm multilayer-coated blazed grating with 33% efficiency in the 3rd order in the EUV wavelength range
Voronov, Dmitriy L., Khounsary, Ali M., Morawe, Christian, Anderson, Erik H., Cambie, Rossana, Goto, Shunji, Salmassi, Farhad, Gullikson, Eric M., Yashchuk, Valeriy V., Padmore, Howard A., Ahn, MinseuVolume:
7448
Year:
2009
Language:
english
DOI:
10.1117/12.826921
File:
PDF, 2.27 MB
english, 2009