SPIE Proceedings [SPIE SPIE Advanced Lithography - San...

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SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California (Sunday 12 February 2012)] Optical Microlithography XXV - 14nm M1 triple patterning

Li, Qiao, Ghosh, Pradiptya, Abercrombie, David, LaCour, Pat, Kanodia, Suniti, Conley, Will
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Volume:
8326
Year:
2012
Language:
english
DOI:
10.1117/12.916610
File:
PDF, 555 KB
english, 2012
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