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SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California (Sunday 12 February 2012)] Extreme Ultraviolet (EUV) Lithography III - EUVL multilayer mask blank defect mitigation for defect-free EUVL mask fabrication
Yan, Pei-Yang, Liu, Yan, Kamna, Marilyn, Zhang, Guojing, Chen, Robert, Martinez, Fabian, Naulleau, Patrick P., Wood II, Obert R.Volume:
8322
Year:
2012
Language:
english
DOI:
10.1117/12.927018
File:
PDF, 1.23 MB
english, 2012